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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • workpiecesUS7147543Jul 28, 2005Dec 12, 2006Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS7160493 *Oct 10, 2003Jan 9, 2007Semplastics, LlcRetaining ring for use on a carrier of a polishing apparatusUS7163439Feb 8, 2006Jan 16, 2007Micron Technology, Inc.Methods and systems for conditioning planar
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