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  • ) ##STR1## wherein R is a hydrogen atom, a lower alkyl group, a C8-13 condensed polycyclic hydrocarbonyl...http://www.google.ca/patents/US5312774?utm_source=gb-gplus-sharePatent US5312774 - Method for manufacturing a semiconductor device comprising titaniumAdvanced Patent SearchPublication numberUS5312774 APublication typeGrantApplication numberUS 07/983,438Publication date17 May 1994Filing date3
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