same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulatorUS596184810 Nov 19955 Oct 1999Thomson-CsfProcess for producing magnetoresistive transducersUS602868924 Jan 199722 Feb 2000The United States Of America As Represented By The Secretary Of The Air ForceMulti-motion micromirrorUS60409