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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The support layer 808 may comprise a material that is at least partially transparent and partially reflective, such as photoresist or other polymers, silicon oxide (SiO2), or alumina (Al2O3), or a material that is opaque, such as molybdenum (Mo) or silicon (e.g., alpha silicon (??-Si)).
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