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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Alkylimido tantalum compounds used as tantalum precursors include alkylimido, tris-alkylamido tantalum compounds, such as (R???N)(R???RN)3Ta, where R, R???, or R??? are independently hydrogen or an alkyl group, such as methyl, ethyl, propyl, butyl, or pentyl.
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