Description
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:155432618
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An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
The reservoir 134 may be in the base 124 below the chuck 122 to provide more control over the temperature of the chuck 122, particularly when the chuck 122 is made of a ceramic material, such as aluminum nitride, aluminum oxide, or silicon oxide.
prov:wasQuotedFrom
google.es
is
prov:wasDerivedFrom
of
isap:62320260
isap:45356714
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