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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The conductive material for the local interconnect 150 and the isolated contact 152 can be of a conductive material such as tungsten (W), tantalum (Ta), titanium (Ti), alloys thereof, and compounds thereof or conductive materials such as copper (Cu), aluminum (Al), alloys thereof, and compounds thereof with appropriate barrier layers.
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