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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • a beam including at least one amorphous silicon layer suspended over the first component, wherein a dimension of the beam normal to the defined plane is at least 1.4 times at least one dimension of the beam in a plane parallel to the defined plane, wherein the beam comprises at least one additional layer composed of a material other than amorphous silicon.
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