BRIEF DESCRIPTION OF THE DRAWINGS [0022]FIGS. 1A to 1D are schematic cross sectional views explaining the fundamental concept of the invention. [0023]FIGS. 2A to 2D are cross sectional views, a plan view, and a graph, explaining an antenna structure and a tunnel current. [0024]FIGS. 3A and 3B are a plan view and a cross sectional view explaining an experimental sample. [0025]FIGS. 4A and 4B are a