prov:value
| - At that point, in a fashion similar to that described in K. S. Lebouitz and A. P. Pisano, ???Microneedles and Microlancets Fabricated Using SOI Wafers and Isotropic Etching,??? Proceedings of the Electrochemical Society, Vol. 98-14, pp. 235???244, 1998, the disclosure of which is incorporated herein by reference, insulating layer 160 may be etched with a chemical, such as hydrofluoric acid, to sep
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