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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • It is now disclosed for the first time a method of manufacturing a structure (such as a microstructure), the method comprising providing a substrate having a substantially planar surface, forming an elongated at least partially buried channel below said planar surface, filling said channel with a second material other than said material, said filant extending through and at least partially filling
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