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  • It was also found out that such metal oxide films as a titanium oxide (TiO2) film and a zirconium oxide (ZrO2) film also have the same effect as that of the SiO2 film. [0042] Taking into account the fact that the SiN film constituting the membranes in the prior art is selected because its physical properties such as strength and elastic constant are suitable for mechanical driving of the bridge me
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