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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • It comprises a cleaning tank A (cleaning chamber) which is filled with a chemical such as hydrofluoric acid and a rinse (cleaning liquid) such as distilled water, wherein objects to be treated, such as semiconductor wafers, are immersed in the chemical and cleaning liquid therein; a drying portion B positioned above the cleaning tank A; and a movement means such as a wafer boat C that holds a plur
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