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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • As the insulating film provided between the substrate 10 and the metal film 11, a single layer structure of an insulating film at least having oxygen or nitrogen such as silicon oxide (SiOx), silicon nitride (SiNx), a silicon oxide film containing nitrogen (SiOxNy film) (x>y) (x and y are positive integers), or a silicon nitride film containing oxygen (SiNxOy film) (x>y) (x and y are positive inte
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