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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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rdf:type
prov:value
  • transmitting an electromechanical signal to at least one input drive comb and at least one movable shuttle, said signal including at least one input and at least one weight; sensing a response to said signal from at least one resonator, said resonator being a component of said microelectromechanical system and comprising at least one input drive comb and at least one movable shuttle; if said micro
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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