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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • tical system PL that projects a pattern image of mask M illuminated with exposure light EL onto substrate P supported by substrate stage PST, and with controller CONT that controls the overall operation of exposure apparatus EX. It should be noted that a ???substrate??? referred to herein is a substrate to be processed to which various kinds of processes, including an exposure process, are applied
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