te, devices including the structure and method of forming sameUS7763158Feb 14, 2006Jul 27, 2010Axon Technologies CorporationMethod for making a tunable cantilever deviceUS7839681Dec 12, 2008Nov 23, 2010Actel CorporationPush-pull FPGA cellUS20030107105Sep 26, 2002Jun 12, 2003Kozicki Michael N.Programmable chip-to-substrate interconnect structure and device and method of forming sameUS20040124407Jun