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  • y 17, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6962520Aug 24, 2004Nov 8, 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS7019512Aug 31, 2004Mar 28, 2006Micron Technology, Inc.Planarity di
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