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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The gas comprises a reactive or inert gas or mixture thereof, including at least one of N2, NH3, O2, N2O, Ar, Ar???H2, H2, GeH4, and a Fluorine based gas, while the radiant energy generates heat substantially within the range of 500??? C. to 1250??? C. Subsequently, a second layer is formed superjacent the barrier film.
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