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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The material of the gate electrode 4 may be, for example, a metal such as Al, W, Mo, or Ta, an alloy of them, silicide, polycrystalline silicon doped with impurities, or polycrystalline silicon formed by subjecting amorphous silicon to laser annealing.
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