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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • filling the exposed openings from the side away from that where the membrane foil is provided with an adhesive so as to secure the membrane foil to the substrate through said adhesive, or evaporating or sputtering a material, such as Cu, on the interior of said openings and on the opposed portions of the membrane foil, so as to secure the membrane foil through said material to the substrate;
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