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  • aethylcyclotetrasiloxane (C8H24O4Si4), or decamethylcyclopentasiloxane (C10H30O5Si5) containing gases may also be used. [0017] The precursor gases can be delivered directly as a gas to the chamber, delivered as a liquid vaporized directly within the chamber, or transported by an inert carrier gas such as helium or argon.
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