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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The thick conductor film 9L2 is a member which constitutes the main body of the second-layer interconnection 9L and is made of, for example, a low resistance material such as Al, Al alloy, tungsten, tungsten alloy, Cu or Cu alloy.
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