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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A conductor such as Cr, Ti, TiN, W, Mo, Ta, ITO, SnO2 or ZnO, an inorganic insulator such as SiNx, SiO2, diamond like carbon (DLC), Al2O3, Ta2O5, or glass, a semiconductor such as Si or SiC, or other materials can be used to form the harder film 64.
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