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  • th embodiments, except the components described above, same reference numbers are assigned to components having the same functions as components in the first to fifth embodiments and their descriptions are omitted accordingly. [0262] Next, operations of the impedance matching data outputting circuit 10E of the sixth embodiment are described by referring to FIGS. 1, 6, 9, 10 and FIGS. 21 to 25.
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