prov:value
| - Moreover, carbon such as diamond, Fullerene (C2n) and the like or metal carbide such as Al4C3, B4C CaC2, Cr3C2, Mo2C MoC, NbC, SiC, TaC, TiC, VC, W2C, WC, ZrC and the like are also effective as the dielectric material of the insulator layer 13.
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