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  • Source electrodes 307 and drain electrodes 308 connecting to the source/drain regions 302 via through-holes formed in the gate insulating film 304 and interlayer dielectric film 306 are formed on the interlayer dielectric film 306 by using, e.g., a metal or alloy such as Mo, MoW, MoTa, Al, or Al???Cu, or highly doped silicon.
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