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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The substrate 26 a is exposed to a vapor flux of atoms of a selected material, e.g., a metal such as Co or Cr or an alloy such as Co???Cr, or stainless steel, generated by the electron beam evaporator 22 to grow a film of the selected material over the substrate.
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