Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:194274938
Sponge
Permalink
An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
Patent US20020123240 - Electronic device manufacture - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsDisclosed are methods of manufacturing electronic devices, particularly integrated circuits, containing organic polysilica low dielectric constant materials.
prov:wasQuotedFrom
google.com
is
prov:wasDerivedFrom
of
isap:270972906
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
About
OpenLink Virtuoso
version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software