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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Gate electrode 122 may include heavily-doped polycrystalline silicon (polysilicon), a metal or metal compound such as TiN, TaSiN, TaC, W, TiW, Al, and so forth, or a combination polysilicon and one or more metal compounds.
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