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  • The controller 224 may be programmed to control the power levels, voltages, currents and frequencies of the various sources for the electromagnets as well. [0060] As best seen in FIG. 7, the target 146 includes an aluminum or titanium backing plate 230 to which is soldered or diffusion bonded a target sputtering portion 232 of the metal to be deposited, such as tantalum or copper.
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