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owl:sameAs
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b3s
b3sifp
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http://www.w3.org/2002/07/owl#
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oplweb
skos-trans
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isa:20151746
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An Entity of Type :
prov:Entity
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webisadb.webdatacommons.org
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prov:Entity
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prov:value
In this embodiment, a first metal film 81 formed from a conductive thin metal film made of a conductive material such as Cr, Ta, Mo and A1 is at first formed on a transparent substrate 80, for example, made of glass shown in FIG. 20 in a step C1.
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isap:141527331
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