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  • 9, 2006Applied Materials Inc.Carrier head with a flexible membraneUS7074114 *Jan 16, 2003Jul 11, 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7101272Jan 15, 2005Sep 5, 2006Applied Materials, Inc.Carrier head for thermal drift compensationUS7121934May 18, 2005Oct 17, 2006Doosan Dnd Co., Ltd.Carrie
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