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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Apparatus for depositing a multilayer optical interference coating on a substrate, comprising:a vacuum chamber; vacuum pump means, connected to said vacuum chamber for creating a vacuum therein; a substrate holder located in said vacuum chamber, said substrate holder being rotatable about an axis generally normal thereto and including means for supporting the substrate thereon; at least one magnet
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