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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A process of fabricating a semiconductor integrated circuit device in a semiconductor substrate, the integrated circuit device having a plurality of memory cells, each memory cell including a capacitor and a MISFET connected to the capacitor in series, comprising:(a) the step of forming a capacitor electrode of polycrystalline silicon over a surface of the semiconductor substrate; (b) the step of
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