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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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rdf:type
prov:value
  • prises at least one material selected from the group consisting of Pt, Ir, IrO2, Ir2O3, Ru, RuO2, TaN, NbN, HfN, ZrN, WN, W2N, Tin, TiSiN, TiAIN, TaSin, NbAIN, and compatible combinations, mixtures and alloys thereof; at least one metal layer in contact with the conductive barrier layer, wherein said metal layer comprises metal or metal alloy including a material selected from the group consisting
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