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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • piecesUS689024418 Sep 200310 May 2005Freudenberg Nonwovens Limited PartnershipPolishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particlesUS689333230 Aug 200417 May 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS692225315 Jul 2
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