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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The bellows-shaped tubular body 810 is formed of a material such as silicon carbide (SIC), and it expands and contracts in accordance with the movement of the wafer support 118 by the movement means 110 to ensure that the wafer support 118 is always kept in a sealed atmosphere.
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