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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The secondary gas can comprise, for example, one or more inert gases, such as argon or helium, a substrate passivating gas such as nitrogen, oxygen, BCl3, fluorocarbons, or hydrofluorocarbons, or reactant-scavenging gases such as hydrogen or ammonia.
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