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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • The component or components 120 is/are manufactured on one side of said sacrificial substrate 100, preferably made of silicon and most preferably single crystalline silicon, although other materials are possible, e.g. AlGaAs, glass, quartz, InP,
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