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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The gate conductors 121 and 124 b preferably include low resistivity material including, for example, Al containing metal such as Al and Al alloy (e.g. Al???Nd), Ag containing metal such as Ag and Ag alloy, and/or Cu containing metal such as Cu and Cu alloy.
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