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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • By way of example only, the solid source 50 can be comprised of a dielectric material such as for example silicon dioxide (SiO2) or quartz which upon bombardment by radio frequency excited ions provide gaseous ions of silicon and oxygen from the solid source into the reaction chamber.
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