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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • platform and its top connected to the concentric platform by means of circular bridge. The center of a SiO.sub.2 /SiN.sub.4 arch-like structure is connected to the piezo element. Valve seats are made of nickel or other sealing substance. In a
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