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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • If the buried insulating layer 14 was provided as a material, such as photoresist, that enables a temporary reversible bond between the lower substrate portion 12 and the upper substrate portion 16, regions or the entire extent of the upper substrate portion 16 can at this point be released from the lower substrate portion.
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