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  • In addition, as materials of the reflective conductive film, a metal such as aluminum (Al), titanium (Ti), silver (Ag), or tantalum (Ta), a metal material including the metal and nitrogen with a concentration of a stoichiometric composition ratio or less, titanium nitride (TiN) or tantalum nitride (TaN) that is nitride of the metal, aluminum containing nickel of 1% to 20% and the like are given.
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