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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • For example, an inorganic insulating material such as silicon oxide, silicon nitride, silicon oxynitride, or silicon nitride oxide; an organic insulating material such as polyimide, acrylic resin, polyamide, polyimideamide, benzocyclobutene, or epoxy resin; or the like can be used.
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