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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The wafer 212 is preferably brought to a testing or processing station which may include, for example, a chuck or other platform that may elevate between prongs 173 and lift the wafer off the end effector 170 and allow the end effector to move away or perform tests with integrated testing devices.
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