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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The ring member 54 is preferably made of a highly heat-conductive material, for example but not limited to, ceramics including aluminum nitride (AlN) and silicon carbide (SiC), aluminum, or stainless steel for the purpose of reduced thermal influence on the wafer W and improved machining accuracy.
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