prov:value
| - For example the carbon atoms may be supplied by compounds such as methane, ethane, propane, benzene, toluene, xylene, ethylene propylene, and other aliphatic and aromatic hydrocarbons, and the silicon atoms may be supplied by compounds, for example, such as silicon tetrachloride, silicon tetrabromide, silicon tetraiodide, or any one or more of mono-, di-, and trichloro-, bromo-, and iodo-silane.
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