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  • 06Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7086927Mar 9, 2004Aug 8, 2006Micron Technology, Inc.Methods and systems for planarizing workpieces, e.g., microelectronic workpiecesUS7086933Apr 22, 2002Aug 8, 2006Applied Materials, Inc.Flexible polishing fluid delivery systemUS7094695Aug 21, 2002Aug 22,
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